Controlling Zeiss GIS valves

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user-3513
Posts: 2
Joined: Thu Jan 01, 1970 1:00 am

Controlling Zeiss GIS valves

Post by user-3513 »

Good day. I`m looking for the way to implement control over GIS' (Zeiss construction) precursor valve operation. I want to use it for EBID with external scan generator. I need to perform a simple "valve open" and "valve close" command. As far as I know there is no direct way to do it with FIB API without creating Sample, defining Operation and specifying SetMillingTime (witch will be different each new deposition with a very difficult procedure to calculate the estimate value for it prior to EBID itself).
user-42
Posts: 27
Joined: Thu Jan 01, 1970 1:00 am

Post by user-42 »

Dear masta,

I have moved this thread to the 'Instrument Control' subforum, as we would like to keep detailed technical discussion restricted to registered users.

I will get back to your question on GIS control shortly.

Best regards,
Heiko
user-2734
Posts: 4
Joined: Thu Jan 01, 1970 1:00 am

Post by user-2734 »

masta wrote: I need to perform a simple "valve open" and "valve close" command. As far as I know there is no direct way to do it with FIB API without creating Sample, defining Operation and specifying SetMillingTime
Hello,
Firstly I would not expect you to use the FIB API.
GIS Valve commands up to and including SmartSEM 5.6:

Primary Multi GIS
DP_GIS_CHANNEL RO GIS Channel
0 S_NONE None
1 S_1 1
2 S_2 2
3 S_3 3
4 S_4 4
5 S_5 5

Primary Single GIS
DP_GIS_CHANNEL RO GIS Channel
0 S_NONE None
1 S_1 1

Note: The parameter DP_GIS_CHANNEL is used both for status update and as a means of Opening and Closing. Programmatically you set DP_GIS_CHANNEL to value "1" to open Valve 1, to "0" to close


Secondary Single GIS

CMD_GIS_2ND_CLOSE_VALVE Close Secondary GIS Valve
CMD_GIS_2ND_OPEN_VALVE Open Secondary GIS Valve

In the new SmartSEM 5.7 (due for release Nov 2013) we changed the dual use of the DP_GIS_CHANNEL parameter. From now on it will be read-only so display the valve status only.

New commands for the primary GIS:
CMD_GIS_OPEN_CHANNEL1 Open GIS channel 1


rule :
Enabled if GIS Enabled is Yes and (Vac Status is
Ready or Vac Status is Pumping)


CMD_GIS_OPEN_CHANNEL2 Open GIS Channel 2
CMD_GIS_OPEN_CHANNEL3 Open GIS Channel 3
CMD_GIS_OPEN_CHANNEL4 Open GIS Channel 4
CMD_GIS_OPEN_CHANNEL5 Open GIS Channel 5
CMD_GIS_CLOSE_CHANNEL Close GIS Channel


Regards, Hidde Wallaart
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