Controlling Zeiss GIS valves
Controlling Zeiss GIS valves
Good day. I`m looking for the way to implement control over GIS' (Zeiss construction) precursor valve operation. I want to use it for EBID with external scan generator. I need to perform a simple "valve open" and "valve close" command. As far as I know there is no direct way to do it with FIB API without creating Sample, defining Operation and specifying SetMillingTime (witch will be different each new deposition with a very difficult procedure to calculate the estimate value for it prior to EBID itself).
Hello,masta wrote: I need to perform a simple "valve open" and "valve close" command. As far as I know there is no direct way to do it with FIB API without creating Sample, defining Operation and specifying SetMillingTime
Firstly I would not expect you to use the FIB API.
GIS Valve commands up to and including SmartSEM 5.6:
Primary Multi GIS
DP_GIS_CHANNEL RO GIS Channel
0 S_NONE None
1 S_1 1
2 S_2 2
3 S_3 3
4 S_4 4
5 S_5 5
Primary Single GIS
DP_GIS_CHANNEL RO GIS Channel
0 S_NONE None
1 S_1 1
Note: The parameter DP_GIS_CHANNEL is used both for status update and as a means of Opening and Closing. Programmatically you set DP_GIS_CHANNEL to value "1" to open Valve 1, to "0" to close
Secondary Single GIS
CMD_GIS_2ND_CLOSE_VALVE Close Secondary GIS Valve
CMD_GIS_2ND_OPEN_VALVE Open Secondary GIS Valve
In the new SmartSEM 5.7 (due for release Nov 2013) we changed the dual use of the DP_GIS_CHANNEL parameter. From now on it will be read-only so display the valve status only.
New commands for the primary GIS:
CMD_GIS_OPEN_CHANNEL1 Open GIS channel 1
rule :
Enabled if GIS Enabled is Yes and (Vac Status is
Ready or Vac Status is Pumping)
CMD_GIS_OPEN_CHANNEL2 Open GIS Channel 2
CMD_GIS_OPEN_CHANNEL3 Open GIS Channel 3
CMD_GIS_OPEN_CHANNEL4 Open GIS Channel 4
CMD_GIS_OPEN_CHANNEL5 Open GIS Channel 5
CMD_GIS_CLOSE_CHANNEL Close GIS Channel
Regards, Hidde Wallaart